* Corresponding authors

^a State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, China
E-mail: zhengty@mail.tsinghua.edu.cn
Tel: +86-10-62783199

^b Laboratory for Chemistry and Physics of Interfaces, Department of Microsystems Engineering (IMTEK), University of Freiburg, Georges-Koehler-Allee 103, Freiburg, Germany

^c Laboratory for Membrane Physiology and Technology, Institute of Physiology, University of Freiburg, Hermann-Herder-Str. 7, Freiburg, Germany

^d Ionera Technologies GmbH, Hermann-Herder-Str. 7, Freiburg, Germany