YBCO and BSCCO thin films prepared by wet MOCVD

Abstract

The newly developed technique of low-pressure single aerosol source MOCVD (wet MOCVD) has been applied to prepare thin films of YBa₂Cu₃O_x and Bi₂Sr₂CaCU₂O_x. The influence of the deposition rate, ρ_o2–T conditions, film stoichiometry on the phase composition, orientation and superconducting properties of the films was studied and compared for both systems. Thin films of YBa₂Cu₃O_x with high-T_c(end)= 92 K, j_c(77 K)= 1.7 × 10⁶ A cm^–2; Bi₂Sr₂CaCu₂O_xwith T_c(end)= 84 K, j_c(77K)= 1 × 10⁴A cm^–2 were deposited. On the basis of the crystal chemistry approach the conditions for the various orientations were established.