Patterning of DNA nanostructures on silicon surface by electron beam lithography of self-assembled monolayer
Abstract
Nanoscale patterns of modified
* Corresponding authors
a
Nanotechnology Research Center, Waseda University, Waseda Tsurumaki-cho 513, Shinjuku-ku, Tokyo 162-0041, Japan
E-mail:
zhang@kaw.comm.waseda.ac.jp
Fax: +81-3-5286-9076
Tel: +81-3-5286-9067
b Department of Electronical Engineering and Bioscience, School of Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku-ku, Tokyo 169-8555, Japan
c Department of Physics, School of Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku-ku, Tokyo 169-8555, Japan
d Kagami Memorial Laboratory for Materials Science and Technology, Waseda University, 2-8-26 Nishi-waseda, Shinjuku-ku, Tokyo 169-0051, Japan
Nanoscale patterns of modified
G. Zhang, T. Tanii, T. Funatsu and I. Ohdomari, Chem. Commun., 2004, 786 DOI: 10.1039/B315278B
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