Mass production of uniform-sized nanoporous silicon nanowire anodes viablock copolymer lithography

Abstract

We present a simple, mass production of nonporous and nanoporous silicon nanowire anodes by combining block copolymer masks and metal catalytic etching. Carbon coated nanoporous silicon nanowire anodes exhibit a highly stable cycling performance with a reversible charge capacity of 1500 mA h g⁻¹.