Automated sub-100 nm local anodic oxidation (LAO)-directed nanopatterning of organic monolayer-modified silicon surfaces†
Abstract
The fabrication of
* Corresponding authors
a
UMR 6226 CNRS/Université de Rennes, Sciences Chimiques de Rennes, Matière Condensée et Systèmes Electroactifs (MaCSE), Campus de Beaulieu, Rennes, France
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bruno.fabre@univ-rennes1.fr
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The fabrication of
B. Fabre and C. Herrier, RSC Adv., 2012, 2, 168 DOI: 10.1039/C1RA00450F
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