Synthesis, characterization of silicon(iv) compounds containing 2-alkyl-aminopyridine ligands and evaluation of them as CVD precursors

Abstract

A family of silicon(IV) compounds, where the Si centers of trimethylsilyl (–SiMe₃) are linked with 2-alkyl-aminopyridine ligands, has been synthesized by reaction of the corresponding lithium salt of these ligands and SiMe₃Cl in a general procedure. They were characterized by ¹H NMR, ¹³C NMR, ²⁹Si NMR, EI-MS and elemental analysis where necessary. Thereinto, ²⁹Si NMR and the synthesis of 2-N,N-bis(trimethylsilyl)aminopyridine were achieved for the confirmation of their coordination structures. Significantly, the evaluation of these silicon compounds containing 2-aminopyridinates as CVD precursors was discussed for the first time. Thermal stability, transport behavior and vapour pressures were assessed by simultaneous thermal analyses (STA). Chemical vapor deposition was accomplished in a hot wall CVD reactor system to qualitatively demonstrate the ability of them as CVD precursors.