Low-k and superior comprehensive property hybrid materials of a fluorinated polyimide and pure silica zeolite

Abstract

In this study, various amounts of an amino-derivative of pure silica zeolite nanocrystals (A-PSZN) were blended with fluorinated poly(amic acid) (FPAA) to form a FPAA/A-PSZN precursor solution, and the fluorinated polyimide (FPI)/A-PSZN hybrid films were prepared via spin-coating and following thermal imidization of the FPAA/A-PSZN solution. A series of FPI/A-PSZN hybrid films were investigated scientifically based on the dielectric constant (k), water absorption, dynamic mechanical and thermal and mechanical properties. It is found that the k value decreases from 3.11 for pristine FPI to 2.65 for the FPI/7 wt% A-PSZN hybrid, which is attributed to the air within the micropore of A-PSZN and the inhibited molecular polarization originating from the internal cross-linking structure of hybrids. Due to the effective phase interconnection and the inherent excellent property of A-PSZN, on the other hand, the incorporation of A-PSZN results in the improvement of the storage modulus, glass transition temperature, thermal stability, Young's modulus, tensile strength and the decrease of water absorption, and thermal expansion coefficients for materials. The results indicate that the incorporation of A-PSZN is a promising approach to reduce the k value and improve the comprehensive properties of FPI, and the FPI/A-PSZN hybrid materials are potentially useful in the microelectronic industry.