Transparent ITO mechanical crack-based pressure and strain sensor†
Abstract
Sensors to detect motion with high precision have been extensively studied in diverse engineering research fields. Among them, transparent devices, which have strong adaptability in various fields such as display panels, have not gained much academic interest. In this study, we present a highly sensitive pressure and strain sensor based on a cracked transparent epilayer, indium-tin oxide (ITO), deposited on a transparent PET substrate. This sensor system, with which we demonstrate how to detect pressure and finger motions, exhibits ultra-sensitivity to strain (gauge factor about 4000 at 2% strain), pressure (sensitivity is about 1.91 kPa−1 at pressures from 30 to 70 kPa), and transparency (up to 89% at a wavelength of 560 nm). Also, durability has been validated over 5000 cycles. The sensor thus boasts broad applications including touchscreens and motion detectors.