Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition

Abstract

We report the synthesis of large-scale continuous MoSe₂ films on SiO₂/Si substrates by atmospheric pressure chemical vapor deposition (CVD). As-grown thin films were composed of a continuous monolayer of MoSe₂ and extended up to a millimeter scale. The CVD-grown monolayer MoSe₂ films were uniform in thickness and highly crystalline with hexagonal crystal structures. Raman and photoluminescence spectra showed that CVD-grown monolayer MoSe₂ films have similar vibrational and optical properties to those of mechanically exfoliated monolayer MoSe₂. These results demonstrate that the CVD-grown monolayer MoSe₂ films have reasonably high quality comparable to that of mechanically exfoliated monolayer MoSe₂ flakes.