Self-powered gas sensor based on SiNWs/ITO photodiode

Abstract

Silicon nanowires (SiNWs) with a large surface-to-volume ratio and a low reflectivity are exceedingly attractive building blocks for developing high performance light harvesting devices. Herein, a SiNW/ITO heterojunction was fabricated easily by just compressing the SiNWs and ITO electrode together with a suitable pressure. Under light illumination, the SiNWs/ITO with an optimized structure can generate more than 20 μA photocurrent at zero bias voltage. In the mean time, the photocurrent is very sensitive to NO₂ infiltration into the forest of SiNWs and displays a non-linear relationship with the concentration of NO₂ from 0 to 1000 ppb. In comparison with chemiresistive sensors based on SiNWs only, the sensitivity of the self-powered sensor was improved obviously, showing a limit of detection at ∼5 ppb. The excellent light trapping and sensing performance was attributed to the heterojunction formed between SiNWs and ITO. Since the nano-photodiode device can monitor the surrounding gas without an external power supply, it will ensure that sensor networks can operate independently and sustainably without a battery or at least by extending the life time of a battery. This work may push forward the development of self-powered microsensors using rationally designed nanojunctions.