Flexible and highly sensitive pressure sensors based on microcrack arrays inspired by scorpions

Abstract

Recently, there has been tremendous interest in flexible pressure sensors to meet the technological demands of modern society. For practical applications, pressure sensors with high sensitivity at small strains and low detection limits are highly desired. In this paper, inspired by the slit sensillum of the scorpion, a flexible pressure sensor is presented which has regular microcrack arrays and its reversed pattern acts as a tunable contact area of the sensing material microstructures. The template with regular crack arrays generated on the inner surface is fabricated using a solvent-induced swelling method, which provides a simple and economical way to obtain the controllable fabrication of crack arrays without any physical damage to materials. At the same time, the working principle of the bio-inspired pressure sensor is attributed to pressure-dependent variations because of the contact area change between the interlocking polydimethylsiloxane films with the negative and positive patterns of the microcrack arrays. The device shows good performance, with a gauge factor of 27.79 kPa⁻¹ (0–2.4 kPa), a short response/recovery time (111/95 ms), a low detectable pressure limit and excellent reproducibility over 3000 cycles. Practical applications, such as the detection of human motion and touch sensing, are then tested in this work, and the results imply that it should have significant potential applications in numerous fields. Note that the reversed pattern of the slit sensillum of the scorpion is explored to enhance the performance of pressure sensors, thus opening a new route for the fabrication of flexible pressure sensors, even wearable electronics, in a cost-effective and scalable manner.