Issue 13, 2021
From the journal:

Materials Advances

Plastic strain relaxation and alloy instability in epitaxial corundum-phase (Al,Ga)2O3 thin films on r-plane Al2O3

Marius Grundmann, ORCID logo *a   Tillmann Stralka, ORCID logo a   Michael Lorenz, ORCID logo a   Susanne Selle,b   Christian Patzigb  and  Thomas Höche ORCID logo b  

* Corresponding authors

a Universität Leipzig, Felix Bloch Institute for Solid State Physics, Linnéstr. 5, D-04103 Leipzig, Germany
E-mail: grundmann@physik-uni-leipzig.de

b Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Walter-Huelse-Strasse 1, D-06120 Halle, Germany

Abstract

The growth of (AlxGa1−x)2O3 alloy thin films in the corundum phase on r-plane (01.2) Al2O3 substrates is investigated. The growth mode changes from step flow for pseudomorphic layers to three-dimensional growth for strongly relaxed layers. Atomic force microscopy and transmission electron microscopy reveal defects due to prismatic and basal slip. An instability in the growth of the alloy x ≈ 0.6, manifested in doubly-periodic incorporation of Al-rich slabs, is observed.

Graphical abstract: Plastic strain relaxation and alloy instability in epitaxial corundum-phase (Al,Ga)2O3 thin films on r-plane Al2O3

About
Cited by
Related
Download options Please wait...

Article information

DOI
https://doi.org/10.1039/D1MA00204J
Article type
Paper
Submitted
08 Mar 2021
Accepted
07 May 2021
First published
11 May 2021
This article is Open Access
Creative Commons BY-NC license

Mater. Adv., 2021,2, 4316-4322

Permissions

Request permissions

Plastic strain relaxation and alloy instability in epitaxial corundum-phase (Al,Ga)2O3 thin films on r-plane Al2O3

M. Grundmann, T. Stralka, M. Lorenz, S. Selle, C. Patzig and T. Höche, Mater. Adv., 2021, 2, 4316 DOI: 10.1039/D1MA00204J

This article is licensed under a Creative Commons Attribution-NonCommercial 3.0 Unported Licence. You can use material from this article in other publications, without requesting further permission from the RSC, provided that the correct acknowledgement is given and it is not used for commercial purposes.

To request permission to reproduce material from this article in a commercial publication, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party commercial publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements