Sacrificially etched 2-D nanofluidic channels and nanospaces with integrated floor and ceiling electrodes and arbitrary channel geometries have been demonstrated with channel heights from 20 nm to 400 nm, widths from 800 nm to 40 µm, and lengths up to 3 mm, using SU-8 as the channel structural material.
K. P. Nichols, J. C. T. Eijkel and H. J. G. E. Gardeniers, Lab Chip, 2008, 8, 173 DOI: 10.1039/B715917J
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