Three-dimensional fabrication of heterogeneous microstructures using soft membrane deformation and optofluidic maskless lithography†
Abstract
We propose a method for high-throughput generation of 3D microstructures using a membrane-mounted microfluidic channel. Utilizing an optofluidic maskless lithography system, photopolymerized 3D microstructures are fabricated in a layer-by-layer fashion with the thickness of each layer controlled by the deformation of the membrane. The combination of low numerical aperture optical systems for photopolymerization and a soft membrane for height control allows large area projection