Parallel deposition of size-selected clusters: a novel technique for studying size-selectivity on the atomic scale

Abstract

A new size-selected cluster deposition technique referred to as “parallel-deposition” is presented. An ion beam of multi-sized Au_n clusters was spatially separated into individual cluster sizes by utilizing a Wien filter and the clusters spatially separated based on their atomic sizes were simultaneously deposited on a SiO₂/Si(100) substrate. Parallel-deposited Au_n clusters (n = 6, 7, and 8) on the SiO₂/Si(100) substrate showed even–odd oxidation behaviour upon exposure to an atomic oxygen atmosphere, demonstrating the potential of this new technique to study the size-dependent properties of deposited clusters in various research fields.