Thinning of n-layer MoS2 by annealing a palladium film under vacuum

Abstract

When Pd is thermally evaporated onto n-layer MoS₂, a uniform film is formed on the surface. If Pd/n-layer MoS₂ is annealed at high temperature under vacuum, thinning of n-layer MoS₂ is observed. By controlling the thickness of the Pd film and annealing temperature, one or two top layers of n-layer MoS₂ can be removed during the annealing process. The thinning method presented in this work benefits the future design and fabrication of MoS₂-based devices.