Effects of NaCl treatment on the performance and environmental stability of microporous SiO2-based thin film transistors

Abstract

In this letter, we report the effects of NaCl treatment on the performance and environmental stability of microporous SiO₂-based thin film transistors (TFTs). It was found that appropriate amounts of NaCl treatment significantly improved the electric double layer (EDL) capacitance of such composite solid electrolytes from 1.9 to 4.7 μF cm⁻². A highest field effect mobility of 42.8 cm² V⁻¹ s⁻¹ was found for 1% NaCl treated microporous SiO₂-based TFTs. However, 10% and 26.5% NaCl treated microporous SiO₂-based TFTs showed good environmental stability of the I_on/I_off ratio with reasonable field effect mobility.