*
Corresponding authors
a
IBI-3, Bioelectronics, Forschungszentrum Jülich GmbH, Germany
E-mail:
a.offenhaeusser@fz-juelich.de
b
RWTH Aachen University, Templergraben 55, Germany
c
Fraunhofer Research Institute for Microsystems and Solid State Techologies, D-80686 Munich, Germany
d
ZEA-3, Analytics, Forschungszentrum Jülich GmbH, Germany
e
IBI-2, Mechanobiology, Forschungszentrum Jülich GmbH, Germany
f
IEK-1, Materials Synthesis and Processing, Forschungszentrum Jülich GmbH, Germany
g
Helmholtz Nano Facility, Forschungszentrum Jülich GmbH, Germany
h
PGI-9, Semiconductor Nanoelectronics, Forschungszentrum Jülich GmbH, Germany
i
Neuroelectronics, Munich School of Bioengineering, Department of Electrical and Computer Engineering, Technical University of Munich (TUM), D-85748 Garching, Germany