Issue 13, 2021

Plastic strain relaxation and alloy instability in epitaxial corundum-phase (Al,Ga)2O3 thin films on r-plane Al2O3

Abstract

The growth of (AlxGa1−x)2O3 alloy thin films in the corundum phase on r-plane (01.2) Al2O3 substrates is investigated. The growth mode changes from step flow for pseudomorphic layers to three-dimensional growth for strongly relaxed layers. Atomic force microscopy and transmission electron microscopy reveal defects due to prismatic and basal slip. An instability in the growth of the alloy x ≈ 0.6, manifested in doubly-periodic incorporation of Al-rich slabs, is observed.

Graphical abstract: Plastic strain relaxation and alloy instability in epitaxial corundum-phase (Al,Ga)2O3 thin films on r-plane Al2O3

Article information

Article type
Paper
Submitted
08 Mar 2021
Accepted
07 May 2021
First published
11 May 2021
This article is Open Access
Creative Commons BY-NC license

Mater. Adv., 2021,2, 4316-4322

Plastic strain relaxation and alloy instability in epitaxial corundum-phase (Al,Ga)2O3 thin films on r-plane Al2O3

M. Grundmann, T. Stralka, M. Lorenz, S. Selle, C. Patzig and T. Höche, Mater. Adv., 2021, 2, 4316 DOI: 10.1039/D1MA00204J

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