Highly stable and conformal Ti–organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications

Abstract

Thin-film deposition using sustainable precursors is required for various next-generation green energy applications. Here we report two atomic/molecular layer deposition processes for appreciably stable and conformal Ti–organic thin films and TiO₂:organic superlattices with potential in e.g. battery, photocatalysis and thermoelectric applications. These processes are based on the safe and sustainable titanium isopropoxide as the titanium precursor.