A study of the interfacial resistive switching mechanism by proton exchange reactions on the SiOx layer
Abstract
In this work, we investigated SiOx-based interfacial resistive switching in planar metal–insulator–metal structures using physical/chemical/electrical analyses. This work helps clarify the interfacial reaction process and mechanism in SiOx, and also shows the potential for high temperature operation in future nonvolatile memory applications.