Fabrication and characterization of nanostructured ZnO thin film microdevices by scanning electrochemical cell microscopy†
Abstract
Scanning electrochemical cell microscopy (SECCM) was proven to be a prospective microfabrication method for the in situ synthesis and multiscale assembly of functional nanomaterials into microdevices. Nanostructured ZnO thin film was synthesized and assembled by SECCM, which has excellent electrochemical capacitance and electronic I–V properties.